Radiant energy – Invisible radiant energy responsive electric signalling – Ultraviolet light responsive means
Reexamination Certificate
2006-01-05
2008-12-16
Luu, Thanh X (Department: 2878)
Radiant energy
Invisible radiant energy responsive electric signalling
Ultraviolet light responsive means
C250S559110, C250S310000, C250S492200, C356S237300
Reexamination Certificate
active
07465935
ABSTRACT:
When using a CCD sensor as a photo-detector in a device for inspecting foreign matters and defects, it has a problem of causing electric noise while converting the signal charge, produced inside by photoelectric conversion, into voltage and reading it. Therefore, the weak detected signal obtained by detecting reflected and scattered light from small foreign matters and defects is buried in the electric noise, which has been an obstacle in detecting small foreign matters and defects. In order to solve the above problem, according to the present invention, an electron multiplying CCD sensor is used as a photo-detector. The electron multiplying CCD sensor is capable of enlarging signals brought about by inputted light relatively to the electric noise by multiplying the electrons produced through photoelectric conversion and reading them. Accordingly, compared to a conventional CCD sensor, it can detect weaker light and, therefore, smaller foreign matters and defects.
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Maeda Shunji
Nakano Hiroyuki
Urano Yuta
Uto Sachio
Antonelli, Terry Stout & Kraus, LLP.
Hitachi High-Technologies Corporation
Ko Tony
Luu Thanh X
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