Optics: measuring and testing – By polarized light examination – With light attenuation
Patent
1997-10-20
1999-12-07
Font, Frank G.
Optics: measuring and testing
By polarized light examination
With light attenuation
3562375, G01B 1124
Patent
active
059992662
ABSTRACT:
The present invention is a method for inspecting height, scanning the surface of a subject item having zones of different reflectance with incident light of a prescribed intensity, causing the reflected light from the surface to be imaged with means for detecting light spot positions, and detecting the height of said surface from the light spot position which was imaged, said method comprising: a step of scanning, in a second zone with low reflectance surrounding a first zone with high reflectance with a first intensity of incident light, which is low to the degree that said means for detecting light spot positions is not saturated even with said high reflectance; and a step of scanning, if it is detected that the quantity of light of the imaged light of said reflected light exceeds a prescribed threshold value, with an appropriate second intensity of incident light found from said intensity of incident light and said detected quantity of light at the time of the preceding scan.
REFERENCES:
patent: 4589773 (1986-05-01), Ido et al.
patent: 4698513 (1987-10-01), Tojo et al.
patent: 5392110 (1995-02-01), Yojima et al.
patent: 5654800 (1997-08-01), Svetkoff et al.
Fuse Takashi
Nishiyama Youji
Oshima Yoshitaka
Takahashi Fumiyuki
Tsukahara Hiroyuki
Font Frank G.
Fujitsu Limited
Smith Zandra V.
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