Method for inspecting electrical devices

Details Method for inspecting electrical devices Method for inspecting electrical devices

1979-06-22

1980-12-02

Dixon, Harold A.

Radiant energy

Radiation tracer methods

250461, 324 54, 324158R, 357 52, G09K 300

Patent

active

042373794

ABSTRACT:
A method of inspecting electrical devices such as integrated circuit devices which have conductors covered by a protective layer of passivating material to determine the quality of the protective layer includes treating the circuit with a fluorescein containing dye and exposing the treated device to UV radiation while applying a voltage between two conductors. Fluorescence is observable in well passivated areas of the device but not in unpassivated or inadequately passivated areas. When a device is tested before dicing from a wafer, adjacent devices to which no voltage is applied fluoresce in both passivated and unpassivated areas.

REFERENCES:
patent: 2472522 (1949-06-01), deForest
patent: 3465150 (1969-09-01), Hugle
patent: 3490873 (1970-01-01), Corl
patent: 3567932 (1971-03-01), Alburger
patent: 3750018 (1973-07-01), Leone et al.
"Dye Lasers" by F. P. Schafer, pp. 164-166, published in Topics in Applied Physics, vol. #1.

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