Optics: measuring and testing – Inspection of flaws or impurities
Reexamination Certificate
2007-02-06
2007-02-06
Toatley, Jr., Gregory J. (Department: 2877)
Optics: measuring and testing
Inspection of flaws or impurities
C356S237300, C356S237400, C382S149000
Reexamination Certificate
active
11042173
ABSTRACT:
A method for inspecting a specimen includes obtaining an image of a specimen through a first optical system, displaying the obtained image of the specimen on a display screen; dividing the displayed image of the specimen into plural regions and setting defect detection sensitivity for each of the plural divided regions, transferring the specimen from the first optical system to a second optical system, obtaining an image of the specimen through the second optical system, detecting defects on the specimen by processing the image obtained through the second optical system using the defect detection sensitivity set for a respective region, and displaying information of the detected defects on the display screen.
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Kembo Yukio
Maeda Shunji
Shibata Yukihiro
Antonelli, Terry Stout and Kraus, LLP.
Hitachi , Ltd.
Stock, Jr. Gordon J.
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