Optics: measuring and testing – Inspection of flaws or impurities
Reexamination Certificate
2011-03-08
2011-03-08
Stafira, Michael P (Department: 2886)
Optics: measuring and testing
Inspection of flaws or impurities
C356S237200, C356S237500
Reexamination Certificate
active
07903244
ABSTRACT:
The present invention is an apparatus for inspecting foreign particles/defects, comprises an illumination optical system, a detection optical system, a shielding unit which is provided in said detection optical system to selectively shield diffracted light pattern coming from circuit pattern existing on an inspection object and an arithmetic processing system, wherein said shielding unit comprises a micro-mirror array device or a reflected type liquid crystal, or a transmission type liquid crystal, or an object which is transferred a shielding pattern to an optical transparent substrate, or a substrate or a film which is etched so as to leave shielding patterns, or an optical transparent substrate which can be changed in transmission by heating, sudden cold, or light illumination, or change of electric field or magnetic field, or a shielding plate of cylindrical shape or plate shape.
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Japanese Office Action dated Mar. 27, 2007.
Hamamatsu Akira
Jingu Takahiro
Nishiyama Hidetoshi
Noguchi Minori
Ohshima Yoshimasa
Antonilli, Terry, Stout & Kraus, LLP.
Hitachi High-Technologies Corporation
Stafira Michael P
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