Method for inspecting a foreign matter on mirror-finished...

Image analysis – Applications – Manufacturing or product inspection

Reexamination Certificate

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Details

C382S144000, C382S145000, C382S146000, C382S147000

Reexamination Certificate

active

08055055

ABSTRACT:
Provided is a foreign matter inspection method for positively detecting a foreign matter in the neighborhood of the edge of a mirror-finished substrate without fail. Edge-emphasis and binarization are performed following the taking of an image of a substrate-under-inspection at a contour of its inspection area, to further detect a plurality of sampling points representative of a contour of the inspection area. An estimated inspection area is determined by determining the size, position and rotation angle of contour lines defined, size-reducibly, from the coordinates of the plurality of sampling points. After applying a mask to the binary image data in an area other than the estimated inspection area, a foreign-matter detection step is performed.

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Chinese Office Action dated Sep. 25, 2009.
International Search Report for Application No. PCT/JP2006/308172, dated May 23, 2006.

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