Image analysis – Applications – Manufacturing or product inspection
Reexamination Certificate
2006-04-19
2011-11-08
Le, Brian (Department: 2624)
Image analysis
Applications
Manufacturing or product inspection
C382S144000, C382S145000, C382S146000, C382S147000
Reexamination Certificate
active
08055055
ABSTRACT:
Provided is a foreign matter inspection method for positively detecting a foreign matter in the neighborhood of the edge of a mirror-finished substrate without fail. Edge-emphasis and binarization are performed following the taking of an image of a substrate-under-inspection at a contour of its inspection area, to further detect a plurality of sampling points representative of a contour of the inspection area. An estimated inspection area is determined by determining the size, position and rotation angle of contour lines defined, size-reducibly, from the coordinates of the plurality of sampling points. After applying a mask to the binary image data in an area other than the estimated inspection area, a foreign-matter detection step is performed.
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Hamada Taizou
Suenaga Tatsutoshi
Le Brian
Panasonic Corporation
RatnerPrestia
LandOfFree
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