Coating processes – Electrical product produced – Welding electrode
Patent
1989-02-28
1991-10-01
Beck, Shrive P.
Coating processes
Electrical product produced
Welding electrode
4272481, 4272555, 118724, 118725, 118728, 118730, 156610, 219390, 219405, 219411, 392411, C23C 1646
Patent
active
050532472
ABSTRACT:
The batch capacity of a barrel epitaxial reactor is improved by increasing the reaction chamber size and increasing the length of the radiant heat source so that a uniform temperature is maintained over a larger flat zone in the reaction chamber. Also, forced air flow from the blower of the reactor is distributed so that a positive air flow is maintained along the exterior wall of the reaction chamber and consequently the wall is maintained at a uniform cold temperature relative to the temperature of the reaction chamber.
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"Precision 7700 Epi System Specifications", Applied Materials, 1989.
AMC 7810 and 7820 Radiantly Heated Epitaxial Reactor Systems, p. 11, Applied Materials, Inc.
Beck Shrive P.
Moore Epitaxial Inc.
Owens Terry J.
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