Method for improving the reproducibility of a coordinate...

Details Method for improving the reproducibility of a coordinate... Method for improving the reproducibility of a coordinate...

2008-05-27

2010-02-02

Bennett, G. Bradley (Department: 2841)

Geometrical instruments

Gauge

With calibration device or gauge for nuclear reactor element

C033S0010MP, C033S503000

Reexamination Certificate

active

07654007

ABSTRACT:
A method for improving the reproducibility of a coordinate measuring machine and its accuracy is disclosed. Using at least one measuring field of a camera, a plurality of images of at least one structure on the substrate are recorded. The substrate is placed on a measuring stage traversable in the X coordinate direction and the Y coordinate direction, the position of which is determined during imaging using a displacement measuring system. The measuring field is displaced by the amount of the deviation determined.

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Carola Blaesing:“Pattern Placement Metrology for Mask Making,” presented by Dr. Carola Bläsing at the Semicon meeting, Education Program in Geneva, Switzerland on Mar. 31, 1998, 11 pages.

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