Method for improving image quality and for increasing...

Details Method for improving image quality and for increasing... Method for improving image quality and for increasing...

2005-01-18

2005-01-18

Rutledge, D. (Department: 2851)

Photocopying

Projection printing and copying cameras

Step and repeat

C355S041000, C355S069000, C355S077000, C250S492100

Reexamination Certificate

active

06844916

ABSTRACT:
A method for the maskless exposure of light-sensitive layers of an object for the micropatterning thereof, is disclosed. In one embodiment, at least one surface light modulator with an associated optical arrangement is irradiated by means of a light source and image fields. Individual structural elements, groups of structural elements or parts thereof are imaged with a predetermined exposure dose on the light-sensitive layer in accordance with the respective driving state of the at least one surface light modulator, the predetermined exposure dose being divided between a plurality of exposure operations. The exposure dose for the individual exposure operations is chosen in such a way that, proceeding from a predetermined minimum exposure dose, the exposure dose is increased for each exposure operation compared with the respective preceding exposure operation. The exposure dose for the last exposure operation is more than 50% of the predetermined exposure dose.

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International Preliminary Examination Report of PCT/DE01/03518, dated Jan. 30, 2003.

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