Metal working – Method of mechanical manufacture – Work holding
Reexamination Certificate
2007-12-21
2011-10-25
Gates, Eric A (Department: 3726)
Metal working
Method of mechanical manufacture
Work holding
C279S106000, C269S020000, C118S503000, C118S730000
Reexamination Certificate
active
08042254
ABSTRACT:
An edge-handling chuck, a system for holding and rotating a test substrate at a high speed and a method for chucking a rotating substrate are disclosed. The Chuck includes a plate having a central axis, a fluid opening and a top surface with a varied topography characterized by symmetry about the central axis. The topography is such that a volume flow rate of fluid between the fluid opening and a periphery of the top surface sufficient to counteract substrate sagging is significantly less than a volume flow rate needed for a similar but flat-surfaced chuck to similarly counteract such sagging. The system may further include a spindle motor and a gas system that supplies gas through the fluid opening to a gap between the top surface and a back surface of the substrate. A radial velocity of the fluid through the gap is approximately constant.
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Belyaev Alexander
Doyle Paul
Petrenko Aleksey
Wolters Christian H.
Gates Eric A
Isenberg Joshua D.
JDI Patent
KLA-Tencor Corporation
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