Method for improvement of optical quality and reduction of backg

Details Method for improvement of optical quality and reduction of backg Method for improvement of optical quality and reduction of backg

1994-05-13

1995-09-19

Hearn, Brian E.

Fishing, trapping, and vermin destroying

437107, 437945, 148DIG65, H01L 21324, H01L 21203

Patent

active

054515521

ABSTRACT:
Post-growth annealing of GaInSb/InAs superlattices at about 400.degree. to 650.degree. C. in an antimony flux followed by cooling results in enhanced optical properties as determined by photoluminescence and in reduced background doping levels as determined by Hall measurements. Accordingly, the annealing procedure represents an advantage over previous fabrication techniques for Ga.sub.1-x In.sub.x Sb/InAs superlattices.

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