Method for hydrogen treatment of field effect transistors for us

Fishing – trapping – and vermin destroying

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437 40, 437248, 148DIG162, H01L 2166

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active

055959172

ABSTRACT:
A method for hydrogen treatment of FETs for use in hermetically sealed packages is disclosed. FETs such as GaInAs HEMTs are treated before hermetic packaging by heating them in a hydrogen atmosphere until their drain currents degrade, and then continuing to heat them until their drain currents are restored. The HEMTs' drain currents are monitored and the process is continued until the currents stabilize. Thereafter the devices' temperature is lowered to the desired operating temperature and their drain currents are measured. If the drain currents after treatment are close enough to the current levels before treatment, the devices are selected; otherwise they are rejected.

REFERENCES:
patent: 4354308 (1982-10-01), Shimada et al.
patent: 5322808 (1994-06-01), Brown et al.
patent: 5381103 (1995-01-01), Edmond et al.
patent: 5395785 (1995-03-01), Nguyen et al.

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