Method for horizontally electroplating, electro deposition...

Electrolysis: processes – compositions used therein – and methods – Electrolytic coating – Coating moving substrate

Reexamination Certificate

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C205S148000

Reexamination Certificate

active

07842176

ABSTRACT:
A method for horizontally electroplating or electro deposition a thin film on a substrate comprises the steps of transferring and positioning a substrate on a substrate supporter; the substrate being positioned approximately horizontally; moving a plurality of stop plates to enclose horizontal edges of the substrate so as to form with an enclosure around an edge of the substrate; moving a first electrode to be in contact with a portion of the substrate; the portion being a non-wired area; moving a second electrode to be above and not in contact with the substrate; wherein the second electrode has a polarity opposite to that of the first electrode; and filling electroplating liquid into the enclosure formed by the stop plates so as to be in contact with the second electrode above the substrate for electroplating or electro deposition.

REFERENCES:
patent: 4120771 (1978-10-01), Dewallens
patent: 5368715 (1994-11-01), Hurley et al.
patent: 5853559 (1998-12-01), Tamaki et al.
patent: 6024856 (2000-02-01), Haydu et al.
patent: 6140234 (2000-10-01), Uzoh et al.
patent: 6153064 (2000-11-01), Condra et al.
patent: 6254760 (2001-07-01), Shen et al.

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