Method for homogenizing the exposure of the different beams...

Details Method for homogenizing the exposure of the different beams... Method for homogenizing the exposure of the different beams...

2005-11-01

2005-11-01

Garcia, Gabriel (Department: 2624)

Facsimile and static presentation processing

Static presentation processing

Plotter

C358S001800

Reexamination Certificate

active

06961146

ABSTRACT:
Disclosed are methods and apparatus for homogenizing the exposure of different beams in a multi beam-plotter. The plotter typically operates on films or plates.

REFERENCES:
patent: 5615198 (1997-03-01), Kubokawa
patent: 5812892 (1998-09-01), Kimba et al.
patent: 6046819 (2000-04-01), Yoshida
patent: 6473233 (2002-10-01), Iizuka
patent: 0632434 (1995-01-01), None
patent: 0879705 (1998-11-01), None
patent: 0895185 (1999-02-01), None
patent: WO9838597 (1998-03-01), None

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