Method for high temperature semiconductor processing

Details Method for high temperature semiconductor processing Method for high temperature semiconductor processing

1974-07-08

1976-03-09

Ozaki, G.

Metal treatment

Process of modifying or maintaining internal physical...

Chemical-heat removing or burning of metal

148186, 148187, H01L 736

Patent

active

039430154

ABSTRACT:
A method for high temperature processing in device fabrication wherein multi-processing steps are performed in the absence of subjecting the unit to ambient conditions.

REFERENCES:
patent: 3571914 (1971-03-01), Lands et al.
patent: 3615942 (1971-12-01), Blumenfeld et al.
patent: 3793090 (1974-02-01), Barile et al.

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