Method for heat-treating a compound semiconductor

Details Method for heat-treating a compound semiconductor Method for heat-treating a compound semiconductor

1994-10-25

1996-02-27

Fourson, George

Fishing, trapping, and vermin destroying

437174, 437934, 437987, 148DIG113, H01L 21324

Patent

active

054948614

ABSTRACT:
A method for heat-treating a compound semiconductor comprising a step of heat-treating a susceptor in a manner as to be disposed on a surface of the compound semiconductor with oposing each other, the susceptor comprising a compound of nitrogen and a group III element such as aluminum nitride.

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patent: 4879259 (1989-11-01), Reynolds et al.
patent: 4944834 (1990-07-01), Tada et al.
patent: 5091044 (1992-02-01), Tanaka
patent: 5202283 (1993-04-01), Younger et al.
patent: 5306895 (1994-04-01), Ushikoshi et al.
patent: 5356476 (1994-10-01), Foster et al.

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