Coherent light generators – Particular beam control device – Nonlinear device
Reexamination Certificate
2011-07-05
2011-07-05
Harvey, Minsun (Department: 2828)
Coherent light generators
Particular beam control device
Nonlinear device
C372S006000, C372S022000, C372S025000
Reexamination Certificate
active
07974320
ABSTRACT:
When the laser light source is caused to standby, the temperatures of semiconductor laser1and semiconductor laser9are changed by approximately 3° C. from the temperature when the laser light source is always being used. With a temperature change of approximately 3° C., the wavelengths of the laser light generated by semiconductor lasers1and9change approximately 0.3 nm. This change hardly has any effect at all on optical fiber amplifier2and optical fiber amplifier10, but the conversion efficiencies at the respective wavelength conversion elements of the wavelength conversion optical system change, and, particularly, deep ultraviolet light is hardly generated at all any longer. Therefore, even while the laser light has been made incident to the wavelength conversion optical system, there is no longer damaging of the wavelength conversion elements. Therefore, it is possible to provide a laser light source standby method that is able to shorten the start up time of the laser light source.
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Takada Yasutoshi
Tokuhisa Akira
Harvey Minsun
Nikon Corporation
Niu Xinning
Oliff & Berridg,e PLC
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