Method for growing transparent conductive gallium-indium-oxide f

Details Method for growing transparent conductive gallium-indium-oxide f Method for growing transparent conductive gallium-indium-oxide f

1993-10-27

1995-12-05

Gross, Anita Pellman

Optical: systems and elements

Holographic system or element

Using a hologram as an optical element

20419229, G02F 11343, H01L 2348

Patent

active

054734568

ABSTRACT:
Applicants have discovered that films of conductively doped GaInO.sub.3 grown on substrates by sputter deposition have conductivity comparable to conventional wide band-gap transparent conductors while exhibiting superior light transmission, particularly in the green and blue wavelength regions of the visible spectrum. Substrate temperatures ranged from 100.degree. C. to 550.degree. C. in an argon-oxygen ambient of total pressure 4 mTorr to 20 mTorr with an optimal oxygen partial pressure in the range 0.5 to 2 mTorr.

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