Method for growing thin films

Details Method for growing thin films Method for growing thin films

2006-07-25

2006-07-25

Turner, Archene (Department: 1775)

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C428S698000

Reexamination Certificate

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07081296

ABSTRACT:
A method of forming a layer over a substrate is provided. Generally, a layer of a first reactive species is deposited over the substrate. The layer of the first reactive species is reacted with a second reactive species to create a first product. Unreacted reactive species is preferentially desorbed leaving a layer of the first product.

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