Method for growing semiconductor epitaxial layers

Details Method for growing semiconductor epitaxial layers Method for growing semiconductor epitaxial layers

1980-01-07

1981-05-19

Ozaki, G.

Metal treatment

Process of modifying or maintaining internal physical...

Chemical-heat removing or burning of metal

29569L, 29580, 148172, 148173, 148191, H01L 21208

Patent

active

042683270

ABSTRACT:
A method for growing semiconductor epitaxial layers for manufacturing semiconductor devices such as light emitting diodes, characterized by

REFERENCES:
patent: 3365630 (1968-01-01), Logan et al.
patent: 3592704 (1971-07-01), Logan et al.
patent: 3646406 (1972-02-01), Logan et al.
patent: 3689330 (1972-09-01), Dosen et al.
patent: 3893875 (1975-07-01), Watanabe et al.
patent: 3935039 (1976-01-01), Beppu et al.
patent: 3948693 (1976-04-01), Weyrich et al.
patent: 3951699 (1976-04-01), Naito et al.

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