Method for growing large silicon carbide single crystals

Details Method for growing large silicon carbide single crystals Method for growing large silicon carbide single crystals

1997-04-21

1999-10-19

Garrett, Felisa

Single-crystal, oriented-crystal, and epitaxy growth processes;

Processes of growth from liquid or supercritical state

Having pulling during growth

117902, 117937, C30B 1500

Patent

active

059682612

ABSTRACT:
An apparatus for growing single-polytype, single crystals of silicon carbide utilizing physical vapor transport as the crystal growth technique. The apparatus has a furnace which has a carbon crucible with walls that border and define a crucible cavity. A silicon carbide source material provided at a first location of the crucible cavity, and a monocrystalline silicon carbide seed is provided at a second location of the crucible cavity. A heat path is also provided in the furnace above the crucible cavity. The crucible has a stepped surface that extends into the crucible cavity. The stepped surface has a mounting portion upon which the seed crystal is mounted. The mounting portion of the stepped surface is bordered at one side by the crucible cavity and is bordered at an opposite side by the furnace heat path. The stepped surface also has a sidewall that is bordered at one side by and surrounds the furnace heat path. The apparatus may also have a thermal insulating member, in which a side of the stepped surface sidewall opposite to the furnace heat path is bordered by the thermal insulating member.

REFERENCES:
patent: 2854364 (1958-09-01), Levy
patent: 4866005 (1989-09-01), Davis et al.
patent: 5211801 (1993-05-01), Stein

Affiliated with

Also associated with

Rating

Method for growing large silicon carbide single crystals does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Method for growing large silicon carbide single crystals, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Method for growing large silicon carbide single crystals will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-2050721