Fishing – trapping – and vermin destroying
Patent
1994-02-07
1995-07-04
Fourson, George
Fishing, trapping, and vermin destroying
H01L 2176
Patent
active
054299829
ABSTRACT:
A method for growing field oxides in a LOCOS technique, including steps of a) pushing a wafer into a furnace, b) causing the furnace in an N.sub.2 O atmosphere to grow a buffer oxide layer on the wafer, c) annealing the wafer, d) growing a silicon nitride layer on the buffer oxide layer, e) applying a photoresist layer on the silicon nitride layer, f) applying a desired mask to the wafer, g) etching undesired parts of the silicon nitride layer according to the mask, h) forming field oxides by an oxidation on where the undesired parts of the silicon nitride layer are etched, wherein the N.sub.2 O atmosphere allows a layer of N atoms piling up at an interface between the wafer and the buffer oxide layer for reducing a rate of the oxidation and, consequently a bird's beak effect thereof. Such method can effectively grow field oxides in the LOCOS technique, which will reduce the bird's beak effect.
REFERENCES:
patent: 4454646 (1984-06-01), Joy et al.
patent: 5236862 (1993-08-01), Pfiester et al.
Stanley Wolf, Solid State Technology (Oct. 1992) pp. 53, 54, 56, 58, and 61.
Stanley Wolf, Solid State Technology (Nov. 1992) pp. 47 and 48.
Stanley Wolf, Solid State Technology, (Dec. 1992) pp. 39, 40, and 41.
Fourson George
National Science Council
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