Method for generating thin layers on a silicone base

Details Method for generating thin layers on a silicone base Method for generating thin layers on a silicone base

1989-07-21

1991-01-08

Silverman, Stanley

Coating processes

Electrical product produced

Welding electrode

427 58, 427 96, 4273762, B05D 306

Patent

active

049834193

ABSTRACT:
The invention provides a method for generating thin layers on a silicon base having a high purity, thermal stability and good dielectric properties wherein non-functionalized organosiloxanes with alkyl groups or alkyl and aryl groups are photochemically polymerized and/or cross-linked by means of pulsed laser radiation with a wavelength of less than 400 nm where the pulse duration is 10 ps to 1 ms, the pulse frequency is 1 Hz to 10 KHz and the energy density is at least 1 J/cm.sup.2 and the irradiation takes placed with one or more pulses. The layers can be used as passivating and insulating layers for semiconductor components and circuits.

REFERENCES:
patent: 3847771 (1974-11-01), McGinniss
patent: 4526807 (1985-07-01), Auerbach
Patent Abstracts of Japan, Bd. 9, Nr. 4 (E-288) (1727), 10. Jan. 1985; & JP-A-59 154 029 (Nippon Denshin Denwa Kosha), 3/09.84.
Chemical Abstracts, Bd. 98, Nr. 12, 21. Marz 1983, S. 258 Zusammenfassung Nr. 93785w, Columbus, Ohio, US; & JP-A-57 181 326 (Mitsubishi Heavy Industries Ltd.) 8.11.82.
IBM Technical Disclosure Bulletin, Bd. 26, Nr. 10B, Marz 1984, 5683, New York, US; D. C. Hofer et al.: "Silane Polymer Excimer Laser Photoresist adasion", 29. Jhrg., (1985), Nr. 10, S. 28-35.
"Plaste and Kautshuk", 34. Jahrg. (1987), Nr. 5, S. 183-190.
"Polymer Preprints", vol. 20 (1979), No. 2, S. 443-446.
"J. Polym. Sci.-Part-A-1", vol. 4 (1966), S. 2107-2120.
"J. Organometal. Chem.", vol. 148 (1978), S. 213-223.

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