Semiconductor device manufacturing: process – Making device or circuit emissive of nonelectrical signal – Including integrally formed optical element
Patent
1996-09-24
2000-05-16
Bowers, Charles
Semiconductor device manufacturing: process
Making device or circuit emissive of nonelectrical signal
Including integrally formed optical element
438 46, 438103, H01L 2100
Patent
active
060636424
ABSTRACT:
A method is disclosed for generating light in one or more buried layers of a multilayer compound semiconductor material by contacting the material with a tansparent, electrically conducting fluid and passing current between the fluid and the semiconductor material. The measured characteristics of the light emitted from a first semiconductor material may be compared with those measured from a second semiconductor material of known properties, and the properties of the first semiconductor material calculated. Uniformity maps of the compound semiconductor material may be prepared using the patterns of various light emission characteristics measured across the surface of the material.
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Grove Michael J.
Hudson, Jr. Douglas A.
Largent Craig C.
Zory, Jr. Peter S.
Berry Renee R.
Bowers Charles
Hodgson Rodney T.
Zory Peter S.
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