Semiconductor device manufacturing: process – Miscellaneous
Reexamination Certificate
2008-01-22
2008-01-22
Ghyka, Alexander (Department: 2812)
Semiconductor device manufacturing: process
Miscellaneous
C430S005000, C716S030000, C257SE21380
Reexamination Certificate
active
11160921
ABSTRACT:
A dynamic mask module is disclosed, which comprises a microcomputer system, a mask pattern generator and a light source. The mask pattern generator is disposed over a substrate and electrically connected to the microcomputer system. The microcomputer system transmits an image signal to the mask pattern generator. The light source is disposed over the mask pattern generator to a photo-resist layer on the substrate. The mask pattern generated by the dynamic mask module is a dynamic image and the mask pattern can be changed on anytime. In addition, the manufacturing cost can be and the manufacturing time can be reduced.
REFERENCES:
patent: 5105215 (1992-04-01), Liu
patent: 2002/0192572 (2002-12-01), Lau
patent: 2004/0265707 (2004-12-01), Socha
Jeng Jeng-Ywan
Shen Chang-Ho
Wang Jia-Chang
Ghyka Alexander
Jiang Chyun IP Office
National Taiwan University of Science and Technology
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