Method for generating a conductive region on a surface of a body

Metal working – Method of mechanical manufacture – Assembling or joining

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29576B, 29591, 148 15, 148187, 148DIG93, 148DIG140, 156643, 357 91, 427 431, 427 531, H01L 21265, H01L 718, B23K 900

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active

046638261

ABSTRACT:
A method for generating an area of increased conductivity on the surface of a body of dielectric material, such as for the purpose of attaching electrodes or other electrical interconnections to the area includes the steps of enclosing the surface within a reducing atmosphere and irradiating the portion of the surface corresponding to the desired conductive area with laser radiation for a selected period of time. The atmosphere may be a hydrogen atmosphere at a pressure in the range of 0-1000 HPa. Additionally, the surface may be preheated prior to irradiation.

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patent: 4496607 (1985-01-01), Mathias
patent: 4542037 (1985-09-01), Delfino
patent: 4572843 (1986-02-01), Saito et al.
Bermudez, Jour. Vac. Sci. Technol. 20 (1982) 51.
Antonini et al., Thin Solid Films, 125 (Mar. 1985), p. 187.

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