Method for generating a boron vapor

Details Method for generating a boron vapor Method for generating a boron vapor

1997-11-22

1999-01-19

Nguyen, Kiet T.

Radiant energy

Ion generation

Field ionization type

250424, H01J 3708

Patent

active

058616306

ABSTRACT:
The present invention relates to a method of generating substantially pure boron ions for use as a plasma-process feed gas. An electrode substance material in the chamber is comprised of a mixture of boron atoms and metal atoms. The substance or compound is thermally decomposable within a suitable temperature range, to provide boron vapor and other species which are substantially not in the vapor state. A heating of the substance material induces the controlled thermal decomposition of the boron compound in a stoichiometrically favorable manner. Magnetic confinement of the simultaneously released electrons causes numerous collisions, resulting in ionization of the vapor, to the plasma state. This plasma may then be extracted and accelerated at a suitable energy toward a workpiece.

REFERENCES:
patent: 5315121 (1994-05-01), Kluge et al.
Handbook of high Temperature Compounds pgs. 175-177. No Date.

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