Method for forming uniform stress-free thin films

Coating processes – Measuring – testing – or indicating – Thickness or uniformity of thickness determined

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156246, 427 86, 427123, 427124, 427126, B05D 512

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039624854

ABSTRACT:
Stress free films of metals, semi-conductors and insulators which have a very uniform thickness and composition and which are supported independent of a substrate, and the method of forming same. Such films have wide application for reflection of light as mirrors and transmission or absorption of light in the form of filters throughout the complete optical spectrum. Also, such films may be used for the study of fundamental properties of the material in question.

REFERENCES:
patent: 3912462 (1975-10-01), Balthis et al.
Anderson, G.W. et al., Optical and Electrical Properties of Boron-Implad Amorphous Germanium Thin Films, in Journal of Applied Physics, 45(10): pp. 4528-4532, Oct. 1974.

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