Method for forming uncooled infrared detector

Fishing – trapping – and vermin destroying

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437 4, 437192, 437228, 437903, 257440, 257446, 257 53, H01L 3118

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active

052886492

ABSTRACT:
A bolometer for detecting radiation in a spectral range is described herein. The bolometer includes an integrated circuit substrate 122 and a pixel body 120 spaced from the substrate 122 by at least one pillar 124. The pixel body 120 comprises an absorber material 132, such as titanium for example, for absorbing radiation in the spectral range, which may be 7 to 12 microns for example. The absorber material 132 heats the pixel body 120 to a temperature which is proportional to the absorbed radiation. An insulating material 134 is formed over the absorber material 132. In addition, a variable resistor material 136, possible amorphous silicon for example, with an electrical resistance corresponding to the temperature of the pixel body 120 is formed over said insulating layer 134. A current flows through the variable resistor material 136 substantially parallel to the integrated circuit substrate 122 for detection. Other systems and methods are also disclosed.

REFERENCES:
patent: 3801949 (1974-04-01), Larrabee
patent: 4654622 (1987-03-01), Foss
patent: 4671853 (1987-06-01), Takayama
patent: 4754139 (1988-06-01), Ennulat et al.
patent: 5010018 (1991-04-01), Polasko et al.
patent: 5010251 (1991-04-01), Grinberg et al.
patent: 5021663 (1991-06-01), Hornbeck
patent: 5059543 (1991-10-01), Wise et al.
patent: 5100479 (1992-03-01), Wise et al.
patent: 5120664 (1992-06-01), Murotani
"Thin-Film Resistance Bolometer IR Detectors", K. C. Liddiard, Infrared Phys., vol. 24, No. 1, pp. 57-64, 1984.
"Thin-Film Resistance Bolometer IR Detectors-II", K. C. Liddiard, Infrared Phys., vol. 26, No. 1, pp. 43-49, 1986.
"Low-Temperature Bolometer Array", M. Boninsegni et al, Rev. Sci. Instrum., vol. 60, No. 4, Apr. 1989.
"Low-Temperature Operating Silicon Bolometers for Nuclear Radiation Detection", G. A. Racine et al, Sensors and Actuators, A21-A23 (1990) 478-481.
"A Thin-Film Bolometer for Radiation Thermometry at Ambient Temperature", W. Lang et al, Sensors and Actuators, A21-A23 (1990) 473-477.

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