Fishing – trapping – and vermin destroying
Patent
1994-04-15
1995-03-14
Chaudhuri, Olik
Fishing, trapping, and vermin destroying
437188, 437192, 437200, 156634, 156664, H01L 21205, H01L 213205
Patent
active
053977424
ABSTRACT:
A method for forming a tungsten plug for wiring metal comprises the steps of: forming a first Ti film and a TiN film on the entire surface of an insulating film at respective thickness, in due order, the insulating film having been etched to form a contact hole therein; forming a TiSi.sub.2 film over the TiN film; forming a blanket tungsten film over the TiSi film; applying etch back to the tungsten film, to form a tungsten plug in the contact hole, the TiSi.sub.2 film being partially covered with tungsten residues and partially exposed; and etching the TiSi.sub.2 film with a solution having different chemical etching powers to the TiSi.sub.2 film and the TiN film, the tungsten residues being removed as the TiSi.sub.2 film is etched. The method is capable of completely removing the tungsten residues which are formed when the blanket tungsten film is subjected to etch back to form the plug for metal wiring and thus, capable of preventing the damage of the plug tungsten and the TiN film. Consequently, there is effected the improvement of semiconductor device reliability and production yield.
REFERENCES:
patent: 4782380 (1988-11-01), Shankar et al.
patent: 4884123 (1989-11-01), Dixit et al.
patent: 4994410 (1991-02-01), Sun et al.
patent: 5162262 (1992-11-01), Ajika et al.
patent: 5240888 (1993-08-01), Hindman et al.
patent: 5242860 (1993-09-01), Nulman et al.
patent: 5312772 (1994-05-01), Yokoyama et al.
Fujimura et al., "Solid Phase Reactions and Change in Stress of Tin/Ti/Si for a Diffusion Barrier", J. Appl. Phys. 67(6) 15 Mar. 1990, p. 2899-2903.
Chaudhuri Olik
Horton Ken
Hyundai Electronics Industries Co,. Ltd.
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