Stock material or miscellaneous articles – Magnetic recording component or stock – Magnetic head
Reexamination Certificate
2006-08-29
2006-08-29
Bernatz, Kevin M. (Department: 1773)
Stock material or miscellaneous articles
Magnetic recording component or stock
Magnetic head
C428S212000, C428S213000, C428S469000, C427S404000, C427S419200, C427S419300, C427S419700, C427S419800
Reexamination Certificate
active
07097923
ABSTRACT:
A tri-layer anti-reflective coating for use in photolithographic applications, and specifically, for use in ultraviolet photolithographic processes. The tri-layered anti-reflective coating is used to minimize pattern distortion due to reflections from neighboring features in the construction of microcircuits. The tri-layer anti-reflection coating features a first layer, a first dielectric layer, an absorption layer disposed on the first dielectric layer, and a second dielectric layer, which is then disposed between the absorption layer and a photoresist layer. At least the absorption layer and dielectric layers can be formed using vacuum deposition. A unique character of the tri-layer anti-reflective coatings is that it dampens reflections structures having severe topologies and also allows a thinner anti-reflection layer that has a wider process latitude.
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Webb Patrick R.
Zolla Howard G.
Bernatz Kevin M.
Chambliss Bahner & Stophel
Hitachi Global Storage Technologies
Lynch David W.
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