Method for forming tapered films

Details Method for forming tapered films Method for forming tapered films

1983-03-10

1985-08-20

Childs, S. L.

Coating processes

Coating by vapor, gas, or smoke

Moving the base

204192R, 204192N, 427 99, 4272481, 4272557, 427282, 427402, C23C 1100, C23C 1300

Patent

active

045364192

ABSTRACT:
Method for forming thin films on a substrate by using a mask through dry process wherein the substrate and the mask are moved relative to each other at least once for the formation of a thin film before the thickness of the thin film being formed on the substrate reaches a predetermined value, so that the formed thin film has an outer edge partly or entirely contoured stepwise.

REFERENCES:
patent: 2676114 (1954-04-01), Barkley
patent: 3510340 (1970-05-01), Jones
patent: 4273812 (1981-06-01), Tsutsui et al.
patent: 4305801 (1981-12-01), Patten et al.
patent: 4344988 (1982-08-01), Sono et al.

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