Method for forming supported thin layers of non-evaporable gette

Coating processes – Heat decomposition of applied coating or base material – Coating decomposed to form metal

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427282, 427652, 427264, 427265, 427270, 4273837, 427552, B05D 302

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active

058827277

ABSTRACT:
A method for forming a supported thin layer of non-evaporable getter (NEG) material and a getter device formed thereby are provided. A suspension comprised of non-evaporable getter (NEG) material particles in a dispersing medium is prepared. The NEG material particles in the suspension have a particle size not greater than about 150 .mu.m. The dispersing medium has an aqueous, alcoholic, or hydroalcoholic base and contains not more than about 1 wt % of organic compounds having a boiling temperature of at least about 250.degree. C. The ratio of the weight of the NEG material particles to the weight of the dispersing medium is between about 4:1 and about 1:1. A layer of the suspension is deposited on a carrier by a serigraphic technique. Next, the deposited layer is dried to evaporate volatile components of the dispersing medium and thereby form a dried deposit. Finally, the dried deposit is sintered under vacuum at a temperature between about 800.degree. C. and 1000.degree. C. with a surface of the dried deposit covered with a refractory material to inhibit scaling. Getter devices formed in accordance with this method also are provided.

REFERENCES:
patent: 3652317 (1972-03-01), della Porta et al.
patent: 3856709 (1974-12-01), della Porta et al.
patent: 3975304 (1976-08-01), della Porta et al.
patent: 4628198 (1986-12-01), Giorgi
patent: 5523165 (1996-06-01), Walter et al.

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