Fishing – trapping – and vermin destroying
Patent
1986-09-04
1988-03-08
Hearn, Brian E.
Fishing, trapping, and vermin destroying
437203, 437 24, 357 67, H01L 21283
Patent
active
047299690
ABSTRACT:
According to the present invention, a method for forming a metal silicide electrode in contact with a doped region of a silicon substrate through a contact hole which is opened through an insulator film over said substrate, comprises the steps of: covering not only the contact hole area but also the insulator film with a metal film; injecting silicon ions into a predetermined area of the metal film covering the insulator portion adjacent the contact hole area; forming a continuous metal siliside film by annealing only on both the hole area and the ion-injected area; removing the metal film to leave the metal silicide film as an electrode which extends laterally to cover the hole area and the adjacent insulator portion. According to another aspect of the present invention, silicon ions are implanted into the area of the indulating film adjacent the contact hole area prior to a conformal deposition of metal. An annealing hep is carried out to form silicide. Unreacted metal is then removed to leave a metal silicide electrode extending laterally to cover both the hole area and the adjacent area of the insulator film.
REFERENCES:
patent: 4339869 (1982-07-01), Reihl et al.
patent: 4551908 (1985-11-01), Nagasawa et al.
patent: 4558509 (1985-12-01), Okabayashi et al.
Rausch et al., "Palladium Silicide Contact . . . ", in IBM TDB, vol. 24, No. 7A, Dec. 1981.
Silicides for VLSI Applications, S. P. Murarka, 1983, Academic Press, pp. 66-69.
Extended Abstracts of the 17th Conference on Solid State Devices and Materials, "A 2.1-GHz 56-mW Two-Modulus Prescaler IC Using Salicide Base Contact Technology", T. Hirao et al., Tokyo, 1985, pp. 381-384.
S. P. Murarka, "Refractory Silicides for Integrated Circuits", Journal of Vacuum Science Technology, 17(4), Jul./Aug. 1980, pp. 775-792.
Hirao Tadashi
Suda Kakutaro
Hearn Brian E.
Mitsubishi Denki & Kabushiki Kaisha
Quach T. N.
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