Method for forming self-aligned thermal isolation cell for a...

Details Method for forming self-aligned thermal isolation cell for a... Method for forming self-aligned thermal isolation cell for a...

2011-04-12

2011-04-12

Purvis, Sue (Department: 2826)

Semiconductor device manufacturing: process

Having selenium or tellurium elemental semiconductor component

C257SE45002

Reexamination Certificate

active

07923285

ABSTRACT:
A non-volatile memory with a self-aligned RRAM element includes a lower electrode element, generally planar in form, having an inner contact surface; an upper electrode element, spaced from the lower electrode element; a containment structure extends between the upper electrode element and the lower electrode element, with a sidewall spacer element having a generally funnel-shaped central cavity with a central aperture; and a spandrel element positioned between the sidewall spacer element and the lower electrode. A RRAM element extends between the lower electrode element and the upper electrode, occupying at least a portion of the sidewall spacer element central cavity and projecting from the sidewall spacer terminal edge toward and making contact with the lower electrode. In this manner, the spandrel element inner surface is spaced from the RRAM element to define a thermal isolation cell adjacent the RRAM element.

REFERENCES:
patent: 3271591 (1966-09-01), Ovshinsky
patent: 3530441 (1970-09-01), Ovshinsky
patent: 4452592 (1984-06-01), Tsai
patent: 4599705 (1986-07-01), Holmberg et al.
patent: 4719594 (1988-01-01), Young et al.
patent: 4769339 (1988-09-01), Ishii et al.
patent: 4876220 (1989-10-01), Mohsen et al.
patent: 4959812 (1990-09-01), Momodomi et al.
patent: 5106775 (1992-04-01), Kaga et al.
patent: 5166096 (1992-11-01), Cote et al.
patent: 5166758 (1992-11-01), Ovshinsky et al.
patent: 5177567 (1993-01-01), Klersy et al.
patent: 5332923 (1994-07-01), Takeuchi et al.
patent: 5391901 (1995-02-01), Tanabe et al.
patent: 5515488 (1996-05-01), Hoppe et al.
patent: 5534712 (1996-07-01), Ovshinsky et al.
patent: 5550396 (1996-08-01), Tsutsumi et al.
patent: 5687112 (1997-11-01), Ovshinsky
patent: 5688713 (1997-11-01), Linliu et al.
patent: 5716883 (1998-02-01), Tseng et al.
patent: 5754472 (1998-05-01), Sim et al.
patent: 5789277 (1998-08-01), Zahorik et al.
patent: 5789758 (1998-08-01), Reinberg
patent: 5807786 (1998-09-01), Chang et al.
patent: 5814527 (1998-09-01), Wolstenholme et al.
patent: 5831276 (1998-11-01), Gonzalez et al.
patent: 5837564 (1998-11-01), Sandhu et al.
patent: 5869843 (1999-02-01), Harshfield
patent: 5879955 (1999-03-01), Gonzalez et al.
patent: 5902704 (1999-05-01), Schoenborn et al.
patent: 5920788 (1999-07-01), Reinberg
patent: 5933365 (1999-08-01), Klersy et al.
patent: 5952671 (1999-09-01), Reinberg et al.
patent: 5958358 (1999-09-01), Tenne et al.
patent: 5970336 (1999-10-01), Wolstenholme et al.
patent: 5985698 (1999-11-01), Gonzalez et al.
patent: 5998244 (1999-12-01), Wolstenholme et al.
patent: 6011725 (2000-01-01), Eitan et al.
patent: 6025220 (2000-02-01), Sandhu
patent: 6031287 (2000-02-01), Harshfield
patent: 6034882 (2000-03-01), Johnson et al.
patent: 6046951 (2000-04-01), El Hajji et al.
patent: 6066870 (2000-05-01), Siek
patent: 6077674 (2000-06-01), Schleifer et al.
patent: 6077729 (2000-06-01), Harshfield
patent: 6087269 (2000-07-01), Williams
patent: 6087674 (2000-07-01), Ovshinsky et al.
patent: 6104038 (2000-08-01), Gonzalez et al.
patent: 6111264 (2000-08-01), Wolstenholme et al.
patent: 6114713 (2000-09-01), Zahorik
patent: 6117720 (2000-09-01), Harshfield
patent: 6147395 (2000-11-01), Gilgen
patent: 6150253 (2000-11-01), Doan et al.
patent: 6153890 (2000-11-01), Wolstenholme et al.
patent: 6177317 (2001-01-01), Huang et al.
patent: 6185122 (2001-02-01), Johnson et al.
patent: 6189582 (2001-02-01), Reinberg et al.
patent: 6236059 (2001-05-01), Wolstenholme et al.
patent: RE37259 (2001-07-01), Ovshinsky
patent: 6271090 (2001-08-01), Huang et al.
patent: 6280684 (2001-08-01), Yamada et al.
patent: 6287887 (2001-09-01), Gilgen
patent: 6291137 (2001-09-01), Lyons et al.
patent: 6314014 (2001-11-01), Lowrey et al.
patent: 6316348 (2001-11-01), Fu et al.
patent: 6320786 (2001-11-01), Chang et al.
patent: 6326307 (2001-12-01), Lindley et al.
patent: 6339544 (2002-01-01), Chiang et al.
patent: 6351406 (2002-02-01), Johnson et al.
patent: 6372651 (2002-04-01), Yang et al.
patent: 6380068 (2002-04-01), Jeng et al.
patent: 6420215 (2002-07-01), Knall et al.
patent: 6420216 (2002-07-01), Clevenger et al.
patent: 6420725 (2002-07-01), Harshfield
patent: 6423621 (2002-07-01), Doan et al.
patent: 6429064 (2002-08-01), Wicker
patent: 6440837 (2002-08-01), Harshfield
patent: 6462353 (2002-10-01), Gilgen
patent: 6483736 (2002-11-01), Johnson et al.
patent: 6487114 (2002-11-01), Jong et al.
patent: 6489645 (2002-12-01), Uchiyama
patent: 6501111 (2002-12-01), Lowrey
patent: 6507061 (2003-01-01), Hudgens et al.
patent: 6511867 (2003-01-01), Lowrey et al.
patent: 6512241 (2003-01-01), Lai
patent: 6514788 (2003-02-01), Quinn
patent: 6514820 (2003-02-01), Ahn et al.
patent: 6534781 (2003-03-01), Dennison
patent: 6545903 (2003-04-01), Wu
patent: 6551866 (2003-04-01), Maeda et al.
patent: 6555860 (2003-04-01), Lowrey et al.
patent: 6563156 (2003-05-01), Harshfield
patent: 6566700 (2003-05-01), Xu
patent: 6567293 (2003-05-01), Lowrey et al.
patent: 6576546 (2003-06-01), Gilbert et al.
patent: 6579760 (2003-06-01), Lung et al.
patent: 6586761 (2003-07-01), Lowrey
patent: 6589714 (2003-07-01), Maimon et al.
patent: 6593176 (2003-07-01), Dennison
patent: 6596589 (2003-07-01), Tseng et al.
patent: 6597009 (2003-07-01), Wicker
patent: 6605477 (2003-08-01), Uchiyama
patent: 6605527 (2003-08-01), Dennison et al.
patent: 6605821 (2003-08-01), Lee et al.
patent: 6607974 (2003-08-01), Harshfield
patent: 6613604 (2003-09-01), Maimon et al.
patent: 6617192 (2003-09-01), Lowrey et al.
patent: 6621095 (2003-09-01), Chiang et al.
patent: 6627530 (2003-09-01), Li et al.
patent: 6639849 (2003-10-01), Takahashi et al.
patent: 6673700 (2004-01-01), Dennison et al.
patent: 6674115 (2004-01-01), Hudgens et al.
patent: 6677678 (2004-01-01), Biolsi et al.
patent: 6744088 (2004-06-01), Dennison
patent: 6750079 (2004-06-01), Lowrey et al.
patent: 6750101 (2004-06-01), Lung et al.
patent: 6791102 (2004-09-01), Johnson et al.
patent: 6797979 (2004-09-01), Chiang et al.
patent: 6800504 (2004-10-01), Li et al.
patent: 6805563 (2004-10-01), Ohashi
patent: 6815704 (2004-11-01), Chen
patent: 6830952 (2004-12-01), Lung et al.
patent: 6838692 (2005-01-01), Lung et al.
patent: 6850432 (2005-02-01), Lu et al.
patent: 6859389 (2005-02-01), Idehara et al.
patent: 6861267 (2005-03-01), Xu et al.
patent: 6864500 (2005-03-01), Gilton
patent: 6864503 (2005-03-01), Lung et al.
patent: 6867638 (2005-03-01), Saiki et al.
patent: 6881603 (2005-04-01), Lai
patent: 6888750 (2005-05-01), Walker et al.
patent: 6894304 (2005-05-01), Moore
patent: 6894305 (2005-05-01), Yi et al.
patent: 6900517 (2005-05-01), Tanaka et al.
patent: 6903362 (2005-06-01), Wyeth et al.
patent: 6909107 (2005-06-01), Rodgers et al.
patent: 6910907 (2005-06-01), Layadi et al.
patent: 6927410 (2005-08-01), Chen
patent: 6928022 (2005-08-01), Cho et al.
patent: 6933516 (2005-08-01), Xu
patent: 6936544 (2005-08-01), Huang et al.
patent: 6936840 (2005-08-01), Sun et al.
patent: 6937507 (2005-08-01), Chen
patent: 6943365 (2005-09-01), Lowrey et al.
patent: 6969866 (2005-11-01), Lowrey et al.
patent: 6972428 (2005-12-01), Maimon
patent: 6972430 (2005-12-01), Casagrande et al.
patent: 6977181 (2005-12-01), Raberg et al.
patent: 6992932 (2006-01-01), Cohen et al.
patent: 7023009 (2006-04-01), Kostylev et al.
patent: 7029924 (2006-04-01), Hsu et al.
patent: 7033856 (2006-04-01), Lung et al.
patent: 7038230 (2006-05-01), Chen et al.
patent: 7038938 (2006-05-01), Kang et al.
patent: 7042001 (2006-05-01), Kim et al.
patent: 7067864 (2006-06-01), Nishida et al.
patent: 7067865 (2006-06-01), Lung et al.
patent: 7078273 (2006-07-01), Matsuoka et al.
patent: 7115927 (2006-10-01), Hideki et al.
patent: 7122281 (2006-10-01), Pierrat
patent: 7122824 (2006-10-01), Khouri et al.
patent: 7126149 (2006-10-01), Iwasaki et al.
patent: 7132675 (2006-11-01), Gilton
patent: 7154774 (2006-12-01), Bedeschi et al.
patent: 7164147 (2007-01-01), Lee et al.
patent: 7166533 (2007-01-01), Happ
patent: 7169635 (2007-01-01), Kozicki
patent: 7202493 (2007-04-01), Lung et al.
patent: 7208751 (2007-04-01), Ooishi et al.
patent: 7214958 (2007-05-01), Happ
patent: 7220983

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