Coating processes – Coating by vapor – gas – or smoke – Base supplied constituent
Patent
1999-02-18
2000-11-28
King, Roy V.
Coating processes
Coating by vapor, gas, or smoke
Base supplied constituent
4273722, 4272481, C23C 1600
Patent
active
061532622
ABSTRACT:
A method for forming SbSI thin films is formed. In the first step of the method, a substrate (14) is provided. Next a buffer layer (16) is formed on the substrate (14). Then, a SbSI source (12) is provided. The SbSI source (12) and buffer layer (16) with substrate (14) are placed in an ampoule (10). The ampoule is heated in a two-zone furnace (11). This causes the SbSI source (12) to form a vapor which reacts with the buffer layer (14) to form a thin film of SbSI.
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Pandey Raghvendra K.
Raina Kanwal K.
Solayappan Narayanan
King Roy V.
The Texas A&M University System
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