Coating processes – Heat decomposition of applied coating or base material
Reexamination Certificate
2005-09-20
2005-09-20
Cameron, Erma (Department: 1762)
Coating processes
Heat decomposition of applied coating or base material
C427S245000, C427S384000
Reexamination Certificate
active
06946161
ABSTRACT:
A method for forming a porous silica film having mechanical strength utilizeses a surfactant, one or more kinds of nonionic surfactant(s) having a 0.1 weight % concentration according to the Du Nouy method expression and a surface tension of 45 mN/m or larger at 25° C. is (are) used as a surfactant, a mixed solution obtained by mixing this nonionic surfactant, a hydrolyzable alkoxysilane compound, water and an alcohol is coated on the substrate, and the surfactant in this mixed solution is decomposed or burned out to form a porous silica film. The surfactant is suitably represented by formula OH(CH2CH2O)x(CH(CH3)CH2O)y(CH2CH2O)xH where x and y denote an integer satisfying 1≦x≦185 and 5≦y≦70, respectively. Alternatively, a mixed solution in which a dimethyldialkoxysilane is added may be used.
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Gomez-Vega et al, International Conference on Processing Materials for Properties, Proceedings, 2nd, San Francisco, CA, Nov. 2000, pp 257-262.
Fujii Nobutoshi
Yamada Kazuhiro
Arent & Fox PLLC
Cameron Erma
Ulvac Inc.
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