Radiation imagery chemistry: process – composition – or product th – Radiation modifying product or process of making – Radiation mask
Reexamination Certificate
2006-03-07
2009-11-03
Huff, Mark F (Department: 1795)
Radiation imagery chemistry: process, composition, or product th
Radiation modifying product or process of making
Radiation mask
C438S487000, C438S166000
Reexamination Certificate
active
07611807
ABSTRACT:
In the present invention, a method is used for forming a poly-silicon film that uses sequential lateral solidification (SLS) with two laser irradiations using a mask for patterning the laser beam so as to increase the grain length. The method also achieves enhancing the throughput due to the use of a mask that is designed for the method.
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Chen Hung-Tse
Chen Yu-Cheng
Chu Fang-Tsun
Birch & Stewart Kolasch & Birch, LLP
Fraser Stewart A
Huff Mark F
Industrial Technology Research Institute
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