Method for forming photovoltaic cells employing multinary semico

Details Method for forming photovoltaic cells employing multinary semico Method for forming photovoltaic cells employing multinary semico

1983-02-28

1984-08-14

Weisstuch, Aaron

Chemistry: electrical and wave energy

Processes and products

Vacuum arc discharge coating

136260, 136264, 136265, 204192P, 204298, C23C 1500, H01L 3118

Patent

active

044655754

ABSTRACT:
At least two constituent elements of a semiconductor compound are deposited in varying proportions by magnetron sputtering to produce a film having a preselected concentration gradient of the constituent elements. The film can be heat treated during or after deposition to diffuse the constituent elements within the film and enhance growth of a desired film structure. The sputtering step may be performed using a planar magnetron having a plurality of continuous magnetically enhanced sputtering cathodes extending about a common axis. Each of the cathodes includes a source structure containing at least one of the constituent elements, and provision for applying electrical power to the source structure to sputter the constituent element at a controlled rate. If one of the elements is difficult to control in the deposition process, it can be sputtered from a cathode made up of a stable alloy of the element and another constituent of the film. For example, when the semiconductor compound is CuInSe.sub.2, two of the sputtering cathodes may comprise In.sub.2 Se.sub.3 and Cu.sub.2 Se, respectively, and a third optimal cathode comprises either Cu or In.

REFERENCES:
patent: 4398055 (1983-08-01), Ijaz et al.

Affiliated with

Also associated with

Rating

Method for forming photovoltaic cells employing multinary semico does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Method for forming photovoltaic cells employing multinary semico, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Method for forming photovoltaic cells employing multinary semico will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-113175