Method for forming photo-defined micro electrical contacts

Details Method for forming photo-defined micro electrical contacts Method for forming photo-defined micro electrical contacts

2005-12-20

2005-12-20

Hollington, Jermele (Department: 2829)

Electricity: measuring and testing

Fault detecting in electric circuits and of electric components

Of individual circuit component or element

C029S846000

Reexamination Certificate

active

06977515

ABSTRACT:
A method of manufacturing a probe test head for testing of semiconductor integrated circuits includes: defining shapes of a plurality of probes as one or more masks; a step for fabricating the plurality of probes using the mask; and disposing the plurality of probes through corresponding holes in a first die and a second die. The step for fabricating the plurality of probes may include one of photo-etching and photo-defined electroforming.

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