Method for forming periodic structure

Details Method for forming periodic structure Method for forming periodic structure

2008-05-06

2011-11-08

Vinh, Lan (Department: 1713)

Etching a substrate: processes

Forming or treating optical article

C216S026000, C216S095000

Reexamination Certificate

active

08052883

ABSTRACT:
A method for forming a periodic structure is disclosed. A structural layer and an optical modulation element are provided. A light is emitted to pass through the optical modulation element to irradiate interference strips on the structural layer. A photoelectrochemical etching (PEC) is performed to form the periodic structure according the interference strips irradiated on the structural layer.

REFERENCES:
patent: 4415414 (1983-11-01), Burton et al.
patent: 6618174 (2003-09-01), Parker et al.
patent: 2007/0190676 (2007-08-01), Chu et al.

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