Method for forming oxide layer

Details Method for forming oxide layer Method for forming oxide layer

1996-10-01

1998-05-19

Lusignan, Michael

Coating processes

Immersion or partial immersion

4274432, B05D 118

Patent

active

057533113

ABSTRACT:
A simple method for forming an oxide layer with improved quality is provided. Incorporation of a trace and suitable amount of alkali metal eliminating agent while forming the oxide layer enhances the deposition rate and the refractive index of the oxide layer and leads to a lower leakage current, and thus the quality of the oxide layer is improved. The present method for forming an oxide layer comprising following steps: a) providing a substrate; b) forming an oxide layer on the substrate; and c) adding an alkali metal eliminating agent while forming the oxide layer on the substrate.

REFERENCES:
patent: 4269654 (1981-05-01), Deckert et al.
patent: 4468420 (1984-08-01), Kawahara et al.
patent: 4894353 (1990-01-01), Ibok
patent: 5153035 (1992-10-01), Sakai et al.
patent: 5506006 (1996-04-01), Chou et al.

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