Coating processes – Immersion or partial immersion – Inorganic base
Patent
1997-09-15
1999-09-28
King, Roy V.
Coating processes
Immersion or partial immersion
Inorganic base
4271263, 427309, 438767, B05D 118
Patent
active
059585196
ABSTRACT:
A method is provided for forming an oxide film on a III-V substrate. The method includes steps of (a) preparing an acidic solution containing a IIIA-ion, (b) adding an basic solution into the acidic solution to provide a growth solution of a specific pH value, and (c) placing the III-V substrate into the growth solution to form the oxide film on the III-V substrate.
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Houng Mau-Phon
Wang Hwei-Heng
Wang Yeong-Her
Brown Michael J.
Chiatalas John L.
Fishman Irving M.
King Roy V.
National Science Council
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