Photocopying – Projection printing and copying cameras – Illumination systems or details
Reexamination Certificate
2005-03-22
2005-03-22
Kim, Peter B. (Department: 2851)
Photocopying
Projection printing and copying cameras
Illumination systems or details
C264S307000
Reexamination Certificate
active
06870602
ABSTRACT:
A method for forming an optical thin film on a substrate comprises the steps of preparing a sol solution containing minute particles for an optical element dispersed in a dispersion medium, putting the prepared sol solution in a tightly closable vessel to heat and pressurize the sol solution, and then applying the heated and pressurized sol solution onto an optical substrate. The obtained thin film has a refractive index of 1.16 with respect to a light beam having a wavelength of 193 nm, in which the transmission loss is not more than 0.5%. An optical lens including the optical thin film formed on the surface, and an exposure apparatus including the lens provided for a projection optical system or an illumination system are provided.
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Ishizawa Hitoshi
Murata Tsuyoshi
Kim Peter B.
Nikon Corporation
Oliff & Berridg,e PLC
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