Method for forming nanoscale features

Details Method for forming nanoscale features Method for forming nanoscale features

2006-02-07

2006-02-07

Heinrich, Samuel M. (Department: 1725)

Electric heating

Metal heating

By arc

C219S121350

Reexamination Certificate

active

06995336

ABSTRACT:
Here is presented a versatile technique for machining of nanometer-scale features using tightly-focused ultrashort laser pulses. By the invention, the size of features can be reduced far below the wavelength of light, thus enabling nanomachining of a wide range of materials. The features may be extremely small (<20 nm) and are highly reproducible.

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