Method for forming metallic capacitor

Details Method for forming metallic capacitor Method for forming metallic capacitor

1999-06-14

2000-07-11

Talbot, Brian K.

Coating processes

Coating by vapor, gas, or smoke

Metal coating

438396, 438629, 427 79, H01L 218242

Patent

active

060869518

ABSTRACT:
A method of forming metallic capacitor. The method includes forming a lower electrode for forming the capacitor and a metal conductive line over an inter-layer dielectric such that there are gaps between and on the sides of the lower electrode and the metal conductive line. Thereafter, a first oxide layer is formed that fills the gap, and then a second oxide layer is formed over the inter-layer dielectric. The second oxide layer is later patterned to form a cap oxide layer having an opening that exposes a portion of the lower electrode. Subsequently, a thin dielectric layer is formed over the lower electrode and the cap oxide layer. Finally, an upper electrode is formed over the thin dielectric layer filling the opening.

REFERENCES:
patent: 4436766 (1984-03-01), Williams
patent: 5057447 (1991-10-01), Paterson

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