Fishing – trapping – and vermin destroying
Patent
1994-11-21
1996-03-26
Wilczewski, Mary
Fishing, trapping, and vermin destroying
437228, 437195, 437192, 1566361, 148DIG20, H01L 21465
Patent
active
055020089
ABSTRACT:
A method of forming a metal plug, including a step of flattening by polishing the surface of a contact plug which is formed by etching back a metal layer, for example, a deposited layer of Blk-W on a substrate. It also makes it possible to print a wiring metal layer by a lithographic process which has thus far been considered difficult to apply to Blk-W. In the method of the invention, a contact hole 3 is opened in an insulation film layer 2 on a substrate 1, and, after coating an adhesion layer 4, a metal layer 5 is deposited on the entire surface. Thereafter, the surface of the metal layer 5 is flattened by a polishing operation, and etched back to form a metal plug 7.
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Gocho Tetsuo
Hayakawa Hideaki
Sato Jun-ichi
Sony Corporation
Tsai H. Jey
Wilczewski Mary
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