Semiconductor device manufacturing: process – Making device or circuit responsive to nonelectrical signal – Responsive to electromagnetic radiation
Reexamination Certificate
2005-12-22
2008-09-02
Lebentritt, Michael S. (Department: 2812)
Semiconductor device manufacturing: process
Making device or circuit responsive to nonelectrical signal
Responsive to electromagnetic radiation
C438S597000, C438S675000, C438S672000, C257SE21575, C257SE21576, C257SE21579, C257SE21252
Reexamination Certificate
active
07419847
ABSTRACT:
A method for forming a metal interconnection of a semiconductor device avoids over-etching and under-etching through the use of the “self-stop” function of a nitridation layer, to prevent the occurrence of openings and voids in a copper interconnection and to obtain a constant trench depth. The method includes forming nitride films on a semiconductor substrate by primary annealing, the semiconductor substrate being provided with a first IMD film and a tungsten plug; depositing a second IMD film on the semiconductor substrate on which the nitride films are formed; depositing a photoresist on the second IMD film and patterning the photoresist; etching the second IMD film using the patterned photoresist to form a trench; removing the nitride films using a chemical; depositing a copper barrier metal film and a copper seed layer in the trench from which the nitride films are removed, and depositing copper; secondarily annealing the substrate on which the copper is deposited; and planarizing the secondarily annealed substrate by chemical-mechanical polishing.
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Ahmadi Mohsen
Dongbu Electronics Co. Ltd.
Lebentritt Michael S.
McKenna Long & Aldridge LLP
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