Method for forming isolation layer and method for...

Details Method for forming isolation layer and method for... Method for forming isolation layer and method for...

2011-06-28

2011-06-28

Lee, Hsien-ming (Department: 2823)

Semiconductor device manufacturing: process

Formation of electrically isolated lateral semiconductive...

Grooved and refilled with deposited dielectric material

C438S431000, C438S700000, C438S795000, C257SE21546, C257SE21547

Reexamination Certificate

active

07968423

ABSTRACT:
A method for fabricating a semiconductor device includes forming a hard mask pattern over a substrate, forming a protection layer by transforming a portion of a sidewall of the hard mask pattern, forming a trench by etching the substrate using the hard mask pattern and the protection layer as an etch barrier, forming an isolation layer by filling the trench with an insulation material, removing the hard mask pattern, and performing a cleaning process. By forming the protection layer, it is possible to prevent the isolation layer from being lost during the removing of the hard mask pattern and the cleaning process and thus prevent generation of a moat.

REFERENCES:
patent: 2002/0045324 (2002-04-01), Ding
patent: 2003/0186137 (2003-10-01), Chan
patent: 2007/0117346 (2007-05-01), Kwak
patent: 2008/0042283 (2008-02-01), Purushothaman et al.
patent: 1020050066368 (2005-06-01), None
Notice of Preliminary Rejection issued from Korean Intellectual Property Office on Dec. 16, 2010.

Affiliated with

Also associated with

Rating

Method for forming isolation layer and method for... does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Method for forming isolation layer and method for..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Method for forming isolation layer and method for... will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-2681934