Method for forming film of uniform thickness on semiconductor su

Details Method for forming film of uniform thickness on semiconductor su Method for forming film of uniform thickness on semiconductor su

1991-02-19

1992-10-13

Hearn, Brian E.

Fishing, trapping, and vermin destroying

437229, 437231, 430325, 430326, H01L 21302, H01L 21304, H01L 21306

Patent

active

051550601

ABSTRACT:
A photoresist of sufficient thickness to fill a scribe line is applied to an entire substrate. The photoresist is exposed through a photomask having a pattern corresponding to the scribe line and then developed. A photosensitized gelatin is applied by spincoating on the flat substrate obtained in this process, pattern and then dyed, to obtain a color filter array.

REFERENCES:
patent: 4088490 (1978-05-01), Duke et al.
patent: 4665010 (1987-05-01), Herd et al.

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